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Overview of ultra-pure and high-purity PFA materials and their unique advantages
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2024-06-06
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Overview of 1. ultra-pure and high-purity PFA materials
The birth of ultra-pure/high-purity PFA: With the increasing demand for purity and precision in special materials (such as semiconductors)
(1) Generally, high-purity PFA refers to special materials that are specifically used in the semiconductor industry, biomedical research, and other fields that require extremely high purity.
(2) The semiconductor industry has extremely strict requirements on the purity of chemicals. Since 1970, the target node size of the semiconductor industry has gradually reduced from 10 microns to 7 nanometers, or even 5 nanometers. Whether wet etching or chemical mechanical polishing (CMP), in the entire manufacturing process of integrated circuits, even a very small amount of impurities can have a serious impact on the final product. Therefore, electronic component manufacturers have extremely strict requirements for raw materials, transportation pipes, reaction vessels, and the like. The improvement of semiconductor industry standards has also promoted the improvement of the purity of electronic chemicals.
Necessity of 2. SEMI F57 Certification
With the increasing demand for the purity of ultrapure water and ultrapure chemicals in advanced semiconductor processes, the level of contaminants is reduced, and the systems and components used for the transportation and storage of these ultrapure substances must avoid the introduction of contamination. Although there are standards and specifications for the quality of ultrapure water and chemicals, most are end-of-line standards for the final product, which are not directly applicable to the manufacturers of individual components. In the SEMI series of specifications, SEMI F57 is a document that provides specifications and recommendations from the aspects of material selection, production process, product design, etc., and provides a reference basis for the suitability evaluation of materials for ultra-pure water and wet chemical delivery systems.
SEMI F57 Test Content
The SEMI F57 test involves the detection of four parameters of the product:
• Anion contamination • Metal ion contamination • Total organic carbon (TOC)• Surface roughness
Significant advantages of 3. high-purity/ultra-pure PFA
(1) Very low impurity content:
In the production process, the purity of raw materials, processing environment and process flow are strictly controlled-the selection of raw materials is extremely strict, highly purified resin is used, the entire manufacturing process is carried out in a clean room environment, and impurity particles and heavy metals are strictly limited The mixing of elements ensures low precipitation and high stability of the product. Ensure that the final product is free of dust, metal ions and other contaminants to meet the needs of applications that require extreme cleanliness.
(2) Easy to process:
High-purity PFA is easy to flanging and welding, and can make various complex shapes. However, the processability of ordinary PFA is affected due to insufficient viscosity or mechanical properties.
(3) Excellent thermal stability:
The thermal stability range of high purity PFA is wider than that of ordinary PFA, the former is -200 to 260 ℃, and the latter is -80 to 260 ℃.
(4) Very strong non-stick:
High-purity PFA hardly adheres to any solid matter, while ordinary PFA only has good non-tackiness.
(5) Low friction coefficient:
The friction coefficient of high-purity PFA is extremely low, about 0.03 to 0.09, while the friction coefficient of ordinary PFA is 0.8.
Types of 4. high-purity/ultra-pure PFA products
High-purity/ultra-pure pipeline; high-purity/ultra-pure valve, etc.
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